NOEMS based on magnetic/phtonic sensitive stimuli polymers

Abstract

The thesis here presented is inspired on functionalized materials (magnetic sensitive stimuli materials (M-SSM) as well as the actuation principles (magnetic and photo-thermic) and material with tuneable magnetic and opto-thermal properties and on the fabrication techniques such as soft- , photolithography and inkjet printing techniques implemented in micro-opto-electro-mechanical systems (MOEMS). This thesis is focused on the development of MOEMS based on new polymeric functionalized materials. Concretely, PDMS cantilevers acting as VOA are achieved by obtaining M-SSMs based on PDMS and ferrofluid (FF). Additionally, light-sensitive materials based on SU-8 and color dyes are characterized and implemented in an all-polymer light actuated VOAs. Each of these systems is obtained with the most suitable technology, such as soft lithography, ink jet printing or UV-lithography and detailed information is presented throughout this work.